The
CHAD SMIF-EZ is the latest product offering in CHAD’s
200mm SMIF pod opener line, designed for use on CHAD Flexible
Front Ends and for OEM integration. Utilizing a single, centrally
mounted lead screw, the SMIF-EZ has smooth motion and eliminates
the binding/hunting possible in dual screw/motor designs.
Designed for a compact footprint with CE/Semi compliance, the
CHAD SMIF-EZ provides an economical, high-performance solution
to contamination control for 200mm systems. Featuring adjustment
free pod lock mechanisms, an optimized stepper motor drive
and a modular build/test design, the CHAD SMIF-EZ provides
the integration solution for today’s leading edge 200mm
wafer processing systems.
FEATURES
· BOLTS Compatible
· Single, Centrally Mounted Motor and Ball Screw
· Optional Wafer Protrusion Detection
· Optional Copper Interlock Pin
· Hard Stop Pod Lock Mechanisms
· Modular Configuration with Major Module Field Replaceable Items
· Minimum Air Pressure Interlock
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